JPH0418436U - - Google Patents
Info
- Publication number
- JPH0418436U JPH0418436U JP5982790U JP5982790U JPH0418436U JP H0418436 U JPH0418436 U JP H0418436U JP 5982790 U JP5982790 U JP 5982790U JP 5982790 U JP5982790 U JP 5982790U JP H0418436 U JPH0418436 U JP H0418436U
- Authority
- JP
- Japan
- Prior art keywords
- section
- wet etching
- semiconductor wafer
- draining
- etching section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001039 wet etching Methods 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5982790U JPH0418436U (en]) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5982790U JPH0418436U (en]) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418436U true JPH0418436U (en]) | 1992-02-17 |
Family
ID=31586668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5982790U Pending JPH0418436U (en]) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418436U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000306881A (ja) * | 1999-03-26 | 2000-11-02 | Applied Materials Inc | 基板洗浄乾燥装置 |
-
1990
- 1990-06-06 JP JP5982790U patent/JPH0418436U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000306881A (ja) * | 1999-03-26 | 2000-11-02 | Applied Materials Inc | 基板洗浄乾燥装置 |